Baking Unit

SVC Series: Baking unit delivers vaporized gas supply through a mass flow controller within an incorporated tank

  • Optimizing temperature control of the supply line to avoid liquefaction
  • All-in-one design supports baking supply with connection to various utilities
  • Changes of system setting are available upon request before factory shipment according to physical properties of the liquid used, volume of vapor supplied, and operating environment
  • Clean design considering maintenance issue
  • Various alarm functions equipped
  • Safe and stable design considering physical properties of gas
  • Download the specification of SVC Series