DeviceNet Mass Flow Controller

MC-5000L Series: DeviceNetTM interface-dedicated mass flow controller in accordance with SEMI

  • Widely-used sensor-actuator Networks DeviceNetTM(ODVA) interface
  • Top or side communication connectors installation available for selection
  • LINTEC’s original ambient temperature-compensated sensor incorporated
  • Highly functional upon installation of microprocessor
  • Diaphragm valve with small dead volume
  • High-speed and high performance piezoelectric actuator
  • Download the specification of MC-5000L series