EtherCAT Mass Flow Controller

MC-5000C Series: EtherCAT-dedicated mass flow controller

  • EtherCAT digital interface in accordance with SEMI E54.20-1108
  • LINTEC’s own ambient temperature-compensated sensor incorporated
  • Highly functional upon installation of microprocessor
  • Diaphragm valve with small dead volume
  • High-speed and high efficiency piezoelectric actuator
  • Download the specification of MC-5000C series