Low Differential Pressure Mass Flow Controller

MC-3000S Series: Mass flow controller equipped with LINTEC’s original low pressure differential device to operate at low differential pressure environment

  • Low pressure differential device
  • RS-485 digital interface
  • LINTEC’s original ambient temperature-compensated sensor incorporate
  • Diaphragm valve with small dead volume
  • High-speed and high performance piezoelectric actuator
  • By using metal case and various filters, stable operation can be acheived through reduction of radio frequency
  • Download the specification of MC-3000S series