Light-Contact Vaporizer

VU-900 Series: Vaporizer providing stable vaporization of liquid source by preventing heat deterioration through reducing possibility of direct contact of liquid with vaporization chamber

  • High precision liquid vaporization system control using solenoid actuator
  • Most suitable for thermally unstable materials such as low-k, high-k, and various metals
  • Rapid vaporization of the liquid sprayed upon the use of double orifice nozzle within vaporization chamber by radiant heating
  • Efficient liquid vaporization control when used in combination with LM-3000L Series
  • Download the specification of VU-900 series