Solenoid Actuator Liquid Vaporizer

VU-450 Series: Solenoid actuator equipped compact vaporizer unit

  • Efficient liquid vaporization control when used in combination with LM-3000L Series
  • High precision liquid vaporization system control using solenoid actuator
  • Vaporizing the multiple liquid materials conccurently when use in combination with liquid mass flow meters
  • This apparatus is most suitable for the use of liquid with low vapor pressure and low flow rate, such as low-k, high-k materials, and various metals
  • Rapid vaporization of the liquid sprayed upon the use of double orifice nozzle within vaporization chamber by radiant heating
  • Download the specification of VU-450 series