Using H2O as an example, 1ml of the liquid phase expands to 1,244ml when vaporized under ideal conditions. This technology has become indispensable for semiconductor manufacturing equipment that reacts by controlling and vaporizing liquid flow, which requires highly precise control of minute flow rates.
stability
Flow control devices for liquids include metering pumps, but metering pumps continuously perform mechanical switching, which causes pulsation. Syringe pumps, which do not have mechanical switching, do not pulsate, but they are not suitable for continuous supply due to the limited volume of the pump.
Also, when liquid is introduced into a vacuum system at a controlled flow rate, the flow rate is not stable with a metering pump due to differential pressure.
In the flow control of the liquid mass flow controller, liquid pressurized to a certain pressure by gas is introduced into the liquid mass flow controller, the instantaneous flow rate is detected by the internal flow sensor, and the valve opening degree is constantly controlled, thus enabling constant flow control whether the secondary side is under reduced pressure or atmospheric pressure.
Liquid Mass Flow Meter
Features | Model | Communication standard Power source | Temperature Accuracy | Keywords Usage |
---|---|---|---|---|
Liquid microflow MFM | LM-3000L | RS-485 Analog 0 to 5V ±15V power supply | 15~35℃ ±1.0%S.P. | Semiconductor Film deposition Vaporizer |
Liquid Mass Flow Controller
Features | Model | Communication standard Power source | Temperature Accuracy | Keywords Usage |
---|---|---|---|---|
Liquid microflow MFC | LM-3000L | RS-485 Analog 0 to 5V ±15V power supply | 15~35℃ ±1.0%F.S. | Semiconductor Film deposition Vaporizer |
Coriolis MFC | LC-4000 | Analog 0 to 5V +24V power supply | 15~35℃ ±1.0%F.S. | Semiconductor Film deposition Vaporizer |
Mass Flow Controller Technology Applied Product
Features | Model | Communication standard | Temperature | Keywords Usage |
---|---|---|---|---|
Control Valve for Liquid | CV-1000 | Analog 0 to 15V | 0~50℃ | Liquid control Semiconductor Analysis |