Lintec’s gas flow control and measurement products

Mass Flow Controller

FeatureModelCommunication standard
Power source
Temperature
Response speed
Accuracy
Keywords
Usage
MC-7000
High-speed MFC
MC-7000DeviceNet
EtherCAT
DC24V power supply
5~50℃
0.2sec
±1.0%S.P.
Semiconductor
Film deposition
ALD
MC-5000C
EtherCAT MFC
MC-5000CEtherCAT
DC24V power supply
5~50℃
1sec
±1.0%S.P.
Semiconductor
Film deposition
ALD
MC-5000L
DeviceNet MFC
MC-5000LDeviceNet
DC24V power supply
5~50℃
1sec
±1.0%S.P.
Semiconductor
Film deposition
ALD
MC-3000L
Digital MFC
MC-3000LRS-485
Analog 0~5V
±15V power supply
5~50℃
1sec
±1.0%S.P.
Semiconductor
Film deposition
Analyzers
MC-3000L TC
High-temperature MFC
MC-3000L-TCRS-485
Analog 0~5V
±15V power supply
Max120℃
1sec
±1.0%F.S.
Semiconductor
Film deposition
Liquefied gas
Analyzers
MC-3000S
Low differential pressure MFC
MC-3000SRS-485
Analog 0~5V
±15V power supply
5~50℃
1sec
±1.0%F.S.
Semiconductor
Film deposition
Liquefied gas
Solid sublimation
MC-700
Variable MFC
MC-700RS-485
Analog 0~5V
±15V power supply
15~35℃
1sec
±1.0%F.S.
Semiconductor
Film deposition
Analyzers
MC-10
Low-cost MFC
MC-10RS-485(option)
Analog 0~5V
±15V power supply
15~35℃
1sac
±1.0%F.S.
Inert gas
Analyzers
Mass flow controller product list

Mass Flow Meter

FeatureModelCommunication standard
Power source
Temperature
Accuracy
Keywords
Usage
高精度マスフローメーター
Digital MFM
MM-3000LRS-485
Analog 0~5V
±15V power supply
5~50℃
±1.0%S.P.
Semiconductor
Film deposition
Analyzers
高温マスフローメータ―
High-temperature MFM
MM-3000L-TNRS-485
Analog 0~5V
±15V power supply
Max120℃
±1.0%F.S.
Semiconductor
Film deposition
Liquefied gas
Analyzers
Mass flow meter product list

Control Valve

FeatureModelPower sourceTemperature
Response speed
Keywords
Usage
コントロールバルブ
Control valve
CV-3000L0~5V0~50℃
0.5sec
Primary pressure control
Back pressure control
Bubbling
Control valve product list