Small gas heater

HX series of highly efficient compact heating controllers that heat fluids instantaneously.

Various fluid heating

Heating block made of SUS316L allows instantaneous heating of fluids without corroding SUS316L because the heater and fluid are not in direct contact.

Reliable gas heating

Gaseous fluids flowing in piping have characteristics that make them difficult to heat and easy to cool.

Generally, heating of fluid in piping is done from the outside of the pipe with a tape heater, but heating from the outside makes it difficult for heat to be transmitted to the center of the fluid. A heat exchanger (HX) capable of instantaneous gas heating to the inside of the fluid can ensure reliable fluid heating.

Gas heating at the rear of the mass flow controller

In the semiconductor manufacturing process, it is necessary not only to heat the gas but also to heat the flow-controlled gas. Therefore, a low pressure drop of the gas heater (secondary side) is required to control the flow rate with a mass flow controller on the primary side of the gas heater. The gas heater (HX) of a mass flow controller manufacturer (Lintec) has a low pressure drop structure.

Gas Heater Product List

Gas heater type	Maximum flow rate N2 conversion	Max. temperature	Maximum power consumption 120V	Maximum power consumption 240V
【HX-0020】	10SLM	200℃	100W	100W
【HX-0051H】	20SLM	300℃	400W	400W
【HX-0050A】	50SLM	200℃	500W	875W
【HX-100C】	100SLM	300℃	700W	875W
【HX-301L】	250SLM	300℃		1200W （three phases）
【HX-300C】	300SLM	250℃		2100W

Gas-heated filter type	Max. temperature	Maximum power consumption 120V	Maximum power consumption 240V	Filtration accuracy
【VF-0201N】	200℃	400W	400W	0.1μm