Compact heat exchanger capable of heating 50 SLM of N2 to 200°C.


  • Compact design with 158 mm (face width) x 80 mm (width) x 80 mm (height)
  • Maximum flow rate 50SLM
  • Maximum operating temperature 200°C
  • Capable of heating gases that do not corrode the gas contacting material (SUS316L)
  • Can be used under vacuum or pressure

examples showing the use (of a word)

Dilute N2 heating prior to installation of abatement equipment


In the exhaust lines of semiconductor and FPD manufacturing equipment, the problem is that the reaction gas adheres to the piping before it is sent to the exclusion device, causing blockage. Therefore, it is common to dilute the gas with hot N2, but heating the gas with a tape heater from the outside of the piping is not sufficient to achieve the desired effect. The compact heat exchanger (HX-0050A) heats the fluid sufficiently to minimize blockages.


Flow rate (N2 conversion)Pressure lossWithstand pressure(G)Max. temperaturegas supply section

*Please contact us directly for detailed specifications of small gas heaters and small heat exchangers.