High-temperature filter integrating a 0.1μm filter and heater.
Designed for use with liquefied gas in the semiconductor manufacturing process, all gas contacting parts are SUS316L, Lintec’s unique low pressure loss construction.
feature
- 0.1µm filtration accuracy
- Max200℃
- All-metal clean construction
examples showing the use (of a word)
Heated filters are installed behind vaporization systems and bubbling to remove verticles and mist that can lead to product defects.
