Power Supply Unit for MFC[PS Series]

This is a dedicated power supply for mass flow controllers that can supply up to 9 units of ±15V power necessary for operation of mass flow controllers and mass flow meters.

The power supply can handle a wide range of voltages from 85 to 240 VAC, and external control is also possible by relaying mass flow setting signals, output signals, and valve open/close signals.

Analog Communications

Flow setting signals and flow output signals are input to the mass flow controller from a host device such as a PLC via the PS series, and a ±15 V power supply is supplied from the PS series.

Digital Communications

When interfacing from a PC such as LabVIEW or communicating digitally from a PLC for noise reduction, supply power ±15 V from the PS series to the mass flow controller.