Vaporizer (direct vaporization method)

A method in which the mass flow rate of a liquid is measured and controlled by a liquid mass flow meter, and the entire amount is vaporized by a vaporizer in a subsequent stage.

Basic principle of direct vaporization method

Liquid mass is measured by a liquid mass flow meter, and liquid flow controlled by a control valve built into the vaporizer is continuously introduced into the vaporization chamber. In the vaporization chamber, the liquid is vaporized instantaneously and continuously. Although the mass is controlled by the liquid, if the liquid is vaporized instantaneously, the mass of the gas after vaporization is also the same, so if the vaporizer is capable of instantaneous continuous vaporization, the mass flow rate of the liquid master = the gas mass flow rate at the exit of the vaporizer.

Since the vaporization concentration factor is directly controlled by MFC, the system is highly stable and can vaporize high concentrations, which is difficult to do with bubbling.

Forte

Fewer temperature control points
Excellent accuracy and stability due to direct flow control
Vaporization can be supplied under reduced or atmospheric pressure conditions
Capable of supplying large flow rates of vaporization

Vaporizer Product List

Carrier gas vaporizer

A vaporizer that heats a flow-controlled liquid and carrier gas to reduce the partial pressure ratio of the liquefied gas to provide a stable vaporization supply.