Micro flow rate compact liquid vaporizer with piezo valve.
Piezo actuator for high-speed, high-precision micro-flow control is mounted near the vaporization chamber. Low dead volume structure.
Compact vaporizer with TEOS: 7g/min, H2O: 0.5g/min. Stable supply is possible by mixing carrier gas (max. flow rate 14 SLM) and flow-controlled liquid and introducing them into the vaporization chamber.
- Micro-flow vaporization
- Easy maintenance
- Valve proximity structure
Examples of Use
Small flow rate vaporization under vacuum and atmospheric conditions
Compact body enables precise flow rate vaporization supply even at continuous micro flow rates. Stable small flow rate vaporization regardless of secondary side pressure conditions.
TEOS, TEB, TEPO vaporization supply
Capable of supplying not only TEOS, which is widely used in semiconductor manufacturing processes, but also various other liquids such as TEB and TEPO. In addition, multiple liquids can be vaporized and supplied simultaneously by using vaporizers in series.
|Max. temperature||Carrier gas flow||Max TEOS vaporization|
Max H2O vaporization