Micro flow rate compact liquid vaporizer with piezo valve.

Piezo actuator for high-speed, high-precision micro-flow control is mounted near the vaporization chamber. Low dead volume structure.

Compact vaporizer with TEOS: 7g/min, H2O: 0.5g/min. Stable supply is possible by mixing carrier gas (max. flow rate 14 SLM) and flow-controlled liquid and introducing them into the vaporization chamber.

Compact vaporizer VU-206
Compact vaporizer VU-206


  • Micro-flow vaporization
  • Easy maintenance
  • Valve proximity structure

Examples of Use

Small flow rate vaporization under vacuum and atmospheric conditions

Compact body enables precise flow rate vaporization supply even at continuous micro flow rates. Stable small flow rate vaporization regardless of secondary side pressure conditions.

TEOS, TEB, TEPO vaporization supply

Capable of supplying not only TEOS, which is widely used in semiconductor manufacturing processes, but also various other liquids such as TEB and TEPO. In addition, multiple liquids can be vaporized and supplied simultaneously by using vaporizers in series.

Specification Table

Max. temperatureCarrier gas flowMax TEOS vaporization
Max H2O vaporization
Seal materials