Highly efficient vaporizer with two-fluid nozzle (liquid nozzle and carrier gas nozzle).
A liquid nozzle and a carrier gas nozzle (0.05~4 SLM) merge just before the vaporization chamber to atomize the liquid into fine particles. Highly efficient liquid vaporization is achieved by radiation heat from the atomized liquid.
A liquid control valve on top of the vaporization chamber receives flow signals from a liquid mass flow meter (LM-3000L) and adjusts the valve opening degree. By controlling the flow rate, stable vaporization supply is possible.
![High-efficiency vaporizer [VU-430]](http://lintec-mfc.com/wp-content/uploads/2023/07/VU-0430N.jpg)
Forte
- Highly efficient vaporization
- Easy maintenance
- Valve proximity structure
Examples of Use
Vaporization of low vapor pressure materials
Highly efficient and stable liquid vaporization supply even with low vapor pressure materials such as Low-K, High-k, and various metals by heat-resistant structure with a maximum temperature of 200°C and two-fluid nozzles. Separate side and bottom temperature control of the heater block enables precise temperature control. Delicate temperature control is possible even for materials prone to thermal denaturation.
Specification Table
| Max. temperature | Carrier gas flow | Max TEOS vaporization Max H2O vaporization | Seal materials |
|---|---|---|---|
| 200℃ | 0.05~4SLM | 10g/min 1g/min | Au |
