High-efficiency vaporizer with two-fluid nozzle and large vaporization chamber for large flow rate and high efficiency.
Highly efficient vaporizer with two-fluid nozzle (liquid nozzle and carrier gas nozzle (0.8 to 180 SLM)) and larger vaporization chamber volume than VU-430 to improve convection time and heat exchange area. Realizes high flow rate vaporization.
Valve-integrated vaporizer enables liquid flow control in the immediate vicinity of the vaporizer when combined with the LM-3000L. Highly responsive vaporization flow control is possible.
- Highly efficient vaporization
- Easy maintenance
- Valve proximity structure
Examples of Use
Large Flow Rate Vaporization
By enlarging the vaporization chamber, the mist sprayed from the center two-fluid nozzle is more diffused than that from VU-430, enabling stable vaporization of large flow rates of 20 g/min for TEOS and 5 g/min for H2O.
|Max. temperature||Carrier gas flow||Max TEOS vaporization|
Max H2O vaporization