High-temperature efficiency vaporizer with a maximum operating temperature of 300°C.
Highly efficient vaporizer with two-fluid nozzle (liquid nozzle and carrier gas nozzle (0.8~180SLM)).
Metal seals and heat-resistant construction enable vaporization at a maximum operating temperature of 300°C.
Equipped with multiple liquid control valves to realize simultaneous flow control and vaporization of multiple liquids such as diluent and cleaning liquid in addition to raw material liquid.
Forte
- Highly efficient vaporization
- Maximum operating temperature 300°C
Option
- Multiple liquid flow control valve
Examples of Use
Vaporization of high boiling point liquids
The two-fluid nozzle and heat-resistant structure with a maximum heating temperature of 300°C make it ideal for vaporizing low-vapor pressure liquids with high boiling points, such as Low-K, High-k, and various metals.
By installing optional multiple liquid control valves near the vaporization chamber, it is possible to vaporize raw material liquids, diluents, and solvents alternately or simultaneously.
Specification Table
| Max. temperature | Carrier gas flow | Max TEOS vaporization Max H2O vaporization | Seal materials |
|---|---|---|---|
| 300℃ | 0.8~130SLM | 20g/min 5g/min | Au |
