Flow control valve installed in high performance mass flow controllers.
CV-3000 Series
Valve opening is adjusted by external communication 0 to 5V. Control valve with piezoelectric actuator for high-speed control of gas flow and pressure control.
SUS-316L block and Au seal enable flow control of corrosive gases.
Forte
- Operating temperature 0 to 50°C
- Metal seal
Option
- Low differential pressure
- Liquefied gas compatible
Specification Table
| Model | MC-3102L-TC | MC-3202L-TC |
|---|---|---|
| Flow rate in Nitrogen(Full scale) | 100CCM, 500CCM, 5LM | 10SLM |
| Flow rate control range | 2 ～ 100% F.S. | |
| Valve aperture setting | 0 ～ 5VDC | |
| Response time | 0.5 sec | |
| Seal materials | Au | |
