Mass flow controller for DeviceNet communication.
MC-5000L Series
The latest semiconductor manufacturing equipment-mounted control devices are increasingly communicating via open fieldwork for high-speed control and simplified wiring, rather than analog control.
Lintec has pioneered the industry’s
MC-5000L mass flow controller for DeviceNet™ communication compliant with SEMI standards. It is equipped with the metal seal required in semiconductor manufacturing and a unique ambient temperature compensated flow sensor. Various options such as liquefied gas compatibility are also available.
Forte
- Accuracy ±1%S.P.
- Operating temperature 5 to 50°C
- Metal seal
- Clean (Particle Guarantee)
- Ambient temperature guaranteed sensor
- DeviceNet™ communication
Option
- Micro Flow F.S.
- Compatible with liquefied gas
- Wide range
Examples of Use
Simplified Wiring
As semiconductor devices are increasingly controlled by field networks, the MFC (MC-5000L) dedicated to DeviceNet communication does not require AD/DA converters or IO boards, making it possible to reduce costs and wiring.
Specification Table
| Model | MC-5100L | MC-5200L | MC-5250L | MC-5460L | MC-5470L |
|---|---|---|---|---|---|
| Flow rate in Nitrogen(Full scale) | 5～5,000SCCM | ～20SLM | ～50SLM | ～150SLM | ～200SLM |
| Flow rate control range | 2 ～ 100% F.S. | ||||
| Accuracy | 100～25% F.S. ±1.0%S.P. 25%～2% F.S. ±0.25% F.S. | 100～35% F.S. ±1.0%S.P. 35%～2% F.S. ±0.35% F.S. | 1% F.S. | ||
| Operating differential pressure | 50 ～ 300kPa | Please check our catalog. | Please check our catalog. | 250 ～ 500kPa | 350 ～ 500kPa |
| Temperature | 5 ～ 50℃ | ||||
| Seal materials | Au | ||||
