Mass flow controller for DeviceNet communication.

MC-5000L Series

The latest semiconductor manufacturing equipment-mounted control devices are increasingly communicating via open fieldwork for high-speed control and simplified wiring, rather than analog control.

Lintec has pioneered the industry’s
MC-5000L mass flow controller for DeviceNet™ communication compliant with SEMI standards. It is equipped with the metal seal required in semiconductor manufacturing and a unique ambient temperature compensated flow sensor. Various options such as liquefied gas compatibility are also available.

DeviceNetTM Mass Flow Controller
MC-5000L Series
DeviceNetTM Mass Flow Controller MC-5000L Series


  • Accuracy ±1%S.P.
  • Operating temperature 5 to 50°C
  • Metal seal
  • Clean (Particle Guarantee)
  • Ambient temperature guaranteed sensor
  • DeviceNet™ communication


  • Micro Flow F.S.
  • Compatible with liquefied gas
  • Wide range

Examples of Use

Simplified Wiring

As semiconductor devices are increasingly controlled by field networks, the MFC (MC-5000L) dedicated to DeviceNet communication does not require AD/DA converters or IO boards, making it possible to reduce costs and wiring.

Specification Table

Flow rate in Nitrogen(Full scale)5~5,000SCCM~20SLM~50SLM~150SLM~200SLM
Flow rate control range2 ~ 100% F.S.
Accuracy100~25% F.S. ±1.0%S.P.
25%~2% F.S. ±0.25% F.S.
100~35% F.S. ±1.0%S.P.
35%~2% F.S. ±0.35% F.S.
1% F.S.
Operating differential pressure50 ~ 300kPaPlease check our catalog.Please check our catalog.250 ~ 500kPa350 ~ 500kPa
Temperature5 ~ 50℃
Seal materialsAu