High performance mass flow controller for EtherCAT communication.

MC-5000C Series

High performance mass flow controller for semiconductor process, EtherCAT communication version, SEMI compliant, controllable via EtherCAT communication used for high-speed conveying system of semiconductor manufacturing equipment.

It is equipped with metal seals required for semiconductor manufacturing processes and Lintec’s unique ambient temperature compensated flow sensor as standard, and can be optionally equipped with liquefied gas support.

EtherCAT® Mass Flow Controller
MC-5000C Series
EtherCAT® Mass Flow Controller MC-5000C Series


  • Accuracy ±1% S.P.
  • Metal seal
  • Clean (Particle Guaranteed)
  • Ambient temperature guaranteed sensor
  • EtherCAT communication


  • Micro Flow F.S.
  • Compatible with liquefied gas
  • Wide range

Examples of Use

Communication Unification of EtherCAT Communication Devices

EtherCAT communication (digital interface) is increasingly used in semiconductor manufacturing equipment for high-speed control of robot arms and other transport systems. 65,536 nodes are available for EtherCAT communication, enabling unification of all measurement and motion elements of the MFC with EtherCAT communication.

Specification Table

Flow rate in Nitrogen(Full scale)5~5,000SCCM~20SLM~50SLM~150SLM~200SLM~300SLM
Flow rate control range2 ~ 100% F.S.
Accuracy100~25% F.S. ±1.0%S.P.
25%~2% F.S. ±0.25% F.S.
100~35% F.S. ±1.0%S.P.
35%~2% F.S. ±0.35% F.S.
1% F.S.2% F.S.
Operating differential pressure50 ~ 300kPa100 ~ 300kPa150 ~ 300kPa250 ~ 500kPa350 ~ 500kPa
Temperature5 ~ 50℃
Seal materialsAu