High performance mass flow controller for EtherCAT communication.
MC-5000C Series
High performance mass flow controller for semiconductor process, EtherCAT communication version, SEMI compliant, controllable via EtherCAT communication used for high-speed conveying system of semiconductor manufacturing equipment.
It is equipped with metal seals required for semiconductor manufacturing processes and Lintec’s unique ambient temperature compensated flow sensor as standard, and can be optionally equipped with liquefied gas support.
Forte
- Accuracy ±1% S.P.
- Metal seal
- Clean (Particle Guaranteed)
- Ambient temperature guaranteed sensor
- EtherCAT communication
Option
- Micro Flow F.S.
- Compatible with liquefied gas
- Wide range
Examples of Use
Communication Unification of EtherCAT Communication Devices
EtherCAT communication (digital interface) is increasingly used in semiconductor manufacturing equipment for high-speed control of robot arms and other transport systems. 65,536 nodes are available for EtherCAT communication, enabling unification of all measurement and motion elements of the MFC with EtherCAT communication.
Specification Table
| Model | MC-5100C | MC-5200C | MC-5250C | MC-5460C | MC-5470C | MC-5580C |
|---|---|---|---|---|---|---|
| Flow rate in Nitrogen(Full scale) | 5～5,000SCCM | ～20SLM | ～50SLM | ～150SLM | ～200SLM | ～300SLM |
| Flow rate control range | 2 ～ 100% F.S. | |||||
| Accuracy | 100～25% F.S. ±1.0%S.P. 25%～2% F.S. ±0.25% F.S. | 100～35% F.S. ±1.0%S.P. 35%～2% F.S. ±0.35% F.S. | 1% F.S. | 2% F.S. | ||
| Operating differential pressure | 50 ～ 300kPa | 100 ～ 300kPa | 150 ～ 300kPa | 250 ～ 500kPa | 350 ～ 500kPa | |
| Temperature | 5 ～ 50℃ | |||||
| Seal materials | Au | |||||
