High performance digital mass flow controller with ±1% S.P. guarantee.
MC-3000L Series
Lintec’s unique ambient temperature compensated sensor enables highly accurate flow measurement even at low temperatures. The sensor is free from age-related deterioration due to heat, and flow control is possible even with highly degradable gases such as ozone.
This high-performance, all-purpose digital mass flow controller is also available with options such as liquefied gas, micro-flow F.S., wide range, and specification of face-to-facet and joints.
MC-3000L Series
Forte
- Accuracy ±1%S.P.
- Operating temperature 5 to 50°C
- Metal seal
- Clean (Particle Guaranteed)
- Ambient temperature compensated sensor
- RS-485 communication
Option
- Micro Flow F.S.
- Compatible with liquefied gas
- Wide range
Examples of Use
Semiconductor manufacturing front-end process
Since highly reactive gases are used in CVD (chemical vapor deposition) ALD deposition and etching equipment, a gas mass flow controller with a highly corrosion-resistant metal seal is essential.
In addition, many precursor gases are liquid at room temperature and pressure, so it is important to have a valve structure that can withstand high temperatures and is resistant to re-liquefaction. The MC-3000L high-precision mass flow controller offers a liquefied gas option and a maximum operating temperature of 50°C (option 55°C).
Analyzers
Analyzers sometimes require micro flow rate control, but the minimum F.S. of general mass flow controllers is 5 SCCM, which does not allow micro flow rate control. The MC-3000L high-precision mass flow controller can optionally be manufactured with an F.S. of 1 SCCM or less. Please contact us for details.
The MC-3000L high-precision mass flow controller is equipped with a diaphragm valve with a small dead volume as standard.
Specification Table
| Model | MC-3102L | MC-3202L | MC-3202L | MC-3252L | MC-3452L | MC-3462L | MC-3472L |
|---|---|---|---|---|---|---|---|
| Flow rate in Nitrogen(Full scale) | 5～5,000SCCM | ～20SLM | ～50SLM | ～50SLM | ～150SLM | ～200SLM | ～400SLM |
| Flow rate control range | 2 ～ 100% F.S. | ||||||
| Accuracy | 100～25% F.S. ±1.0%S.P. 25%～2% F.S. ±0.25% F.S. | 100～35% F.S. ±1.0%S.P. 35%～2% F.S. ±0.35% F.S. | 1% F.S. | 2% F.S. | |||
| Operating differential pressure | 50 ～ 300kPa | Please check our catalog. | Please check our catalog. | 150 ～ 500kPa | 250 ～ 500kPa | 300 ～ 500kPa | 350 ～ 500kPa |
| Temperature | 5 ～ 50℃ | ||||||
| Seal materials | Au | ||||||
