High performance digital mass flow controller with ±1% S.P. guarantee.

MC-3000L Series

Lintec’s unique ambient temperature compensated sensor enables highly accurate flow measurement even at low temperatures. The sensor is free from age-related deterioration due to heat, and flow control is possible even with highly degradable gases such as ozone.

This high-performance, all-purpose digital mass flow controller is also available with options such as liquefied gas, micro-flow F.S., wide range, and specification of face-to-facet and joints.

High Performance Digital Mass Flow Controller
MC-3000L Series


  • Accuracy ±1%S.P.
  • Operating temperature 5 to 50°C
  • Metal seal
  • Clean (Particle Guaranteed)
  • Ambient temperature compensated sensor
  • RS-485 communication


  • Micro Flow F.S.
  • Compatible with liquefied gas
  • Wide range

Examples of Use

Semiconductor manufacturing front-end process

Since highly reactive gases are used in CVD (chemical vapor deposition) ALD deposition and etching equipment, a gas mass flow controller with a highly corrosion-resistant metal seal is essential.

In addition, many precursor gases are liquid at room temperature and pressure, so it is important to have a valve structure that can withstand high temperatures and is resistant to re-liquefaction. The MC-3000L high-precision mass flow controller offers a liquefied gas option and a maximum operating temperature of 50°C (option 55°C).


Analyzers sometimes require micro flow rate control, but the minimum F.S. of general mass flow controllers is 5 SCCM, which does not allow micro flow rate control. The MC-3000L high-precision mass flow controller can optionally be manufactured with an F.S. of 1 SCCM or less. Please contact us for details.

The MC-3000L high-precision mass flow controller is equipped with a diaphragm valve with a small dead volume as standard.

Specification Table

Flow rate in Nitrogen(Full scale)5~5,000SCCM~20SLM~50SLM~50SLM~150SLM~200SLM~400SLM
Flow rate control range2 ~ 100% F.S.
Accuracy100~25% F.S. ±1.0%S.P.
25%~2% F.S. ±0.25% F.S.
100~35% F.S. ±1.0%S.P.
35%~2% F.S. ±0.35% F.S.
1% F.S.2% F.S.
Operating differential pressure50 ~ 300kPaPlease check our catalog.Please check our catalog.150 ~ 500kPa250 ~ 500kPa300 ~ 500kPa350 ~ 500kPa
Temperature5 ~ 50℃
Seal materialsAu