High performance digital mass flow controller with ±1% S.P. guarantee.
Lintec’s unique ambient temperature compensated sensor enables highly accurate flow measurement even at low temperatures. The sensor is free from age-related deterioration due to heat, and flow control is possible even with highly degradable gases such as ozone.
This high-performance, all-purpose digital mass flow controller is also available with options such as liquefied gas, micro-flow F.S., wide range, and specification of face-to-facet and joints.
- Accuracy ±1%S.P.
- Operating temperature 5 to 50°C
- Metal seal
- Clean (Particle Guaranteed)
- Ambient temperature compensated sensor
- RS-485 communication
- Micro Flow F.S.
- Compatible with liquefied gas
- Wide range
Examples of Use
Semiconductor manufacturing front-end process
Since highly reactive gases are used in CVD (chemical vapor deposition) ALD deposition and etching equipment, a gas mass flow controller with a highly corrosion-resistant metal seal is essential.
In addition, many precursor gases are liquid at room temperature and pressure, so it is important to have a valve structure that can withstand high temperatures and is resistant to re-liquefaction. The MC-3000L high-precision mass flow controller offers a liquefied gas option and a maximum operating temperature of 50°C (option 55°C).
Analyzers sometimes require micro flow rate control, but the minimum F.S. of general mass flow controllers is 5 SCCM, which does not allow micro flow rate control. The MC-3000L high-precision mass flow controller can optionally be manufactured with an F.S. of 1 SCCM or less. Please contact us for details.
The MC-3000L high-precision mass flow controller is equipped with a diaphragm valve with a small dead volume as standard.
|Flow rate in Nitrogen(Full scale)||5～5,000SCCM||～20SLM||～50SLM||～50SLM||～150SLM||～200SLM||～400SLM|
|Flow rate control range||2 ～ 100% F.S.|
|Accuracy||100～25% F.S. ±1.0%S.P.|
25%～2% F.S. ±0.25% F.S.
|100～35% F.S. ±1.0%S.P.|
35%～2% F.S. ±0.35% F.S.
|1% F.S.||2% F.S.|
|Operating differential pressure||50 ～ 300kPa||Please check our catalog.||Please check our catalog.||150 ～ 500kPa||250 ～ 500kPa||300 ～ 500kPa||350 ～ 500kPa|
|Temperature||5 ～ 50℃|