High-temperature mass flow controller for use in environments with flow control Max. 120°C and Max. 150°C when not energized.
MC-3000L-TC Series
Gas control at high temperatures is possible by separating the gas contacting part, which is subject to high temperatures, from the substrate part, which is vulnerable to heat.
SUS-316L block and Au sealing material are used for corrosive gases.
Optional low differential pressure specification to prevent re-liquefaction of liquefied gas and MFC specific heater block to heat the gas contacting part are also available.
Forte
- Operating temperature Max 120°C
- Metal seal
- Clean (Particle Guarantee)
- RS-485 communication
Option
- Liquefied Gas Compatible
- Heater block
Examples of Use
Liquefied gas, sublimation gas flow control
The raw material gases for CVD and ALD are not necessarily gases at normal temperature and pressure. Liquid or solid raw materials are often used at normal temperature and pressure. Liquids and solids generate little gas at normal temperatures, making it difficult to control the flow rate in MFC, which uses differential pressure to flow the gas. Therefore, the MFC’s operating pressure is secured by heating the feedstock tank to increase vapor pressure and create differential pressure. The MC-3000L-TC, with its high temperature control and low differential pressure, is ideal for flow control of liquefied and sublimated gases.
Specification Table
| Model | MC-3102L-TC | MC-3202L-TC |
|---|---|---|
| Flow rate in Nitrogen(Full scale) | 10 ～ 5,000SCCM | ～ 25SLM |
| Flow rate control range | 2 ～ 100% F.S. | |
| Accuracy | ±1.0% F.S. | |
| Operating differential pressure | 50 ～ 300kPa | 150 ～ 300kPa |
| Temperature | L：80 ～ 100℃ H：100 ～ 120℃ | |
| Seal materials | Au | |
