Mass flow controller of rubber seal model with fast delivery and low price.
MC-10 Series
Low-cost mass flow controller suitable for flow control of inert gases such as Ar, N2, etc. and Air. Limited specifications enable quick delivery.
Additional optional variable range function enables flow range change, and RS-485 digital communication is also available.
Forte
- low price
Option
- variable function
- RS-485 communication
Examples of Use
PVD
In PVD deposition equipment such as sputtering, Ar is generally used as an inert gas, a stable gas that is less likely to cause chemical reactions. If flow control of such inert gases such as Ar is required with MFC, we recommend a low-cost mass flow controller (MC-10RC) to keep costs down.
Inert gas analysis and experimental equipment
For gas flow control that does not corrode the seal material resin, the low-cost MFC MC-10 is recommended. In addition, the optional VR function allows for in-line gas species and flow range changes. This product is ideal for simple experiments and analyzers.
Specification Table
| Model | MC-10RC | MC-11RC |
|---|---|---|
| Flow rate in Nitrogen(Full scale) | 10 ～ 5,000SCCM | ～ 50SLM |
| Flow rate control range | 2 ～ 100% F.S. | |
| Accuracy | ±1.0% F.S. | |
| Operating differential pressure | 50 ～ 300kPa | 200 ～ 300kPa |
| Temperature | 15 ～ 35℃ | |
| Seal materials | Viton® | |
