Ultra high-speed mass flow controller with response time of 200msec.
MC-7000 Series
Thermal sensor enables high-speed flow control of 100msec(typical). Lintec’s unique non-contact, thermal flow sensor and piezo control valve enable ultra high-speed flow control of corrosive gases.
High accuracy of ±1.0% S.P. flow rate and digital communication method selectable between DeviceNet and EtherCAT.
Forte
- Ultra high-speed flow control 200msec
- Accuracy ±1%S.P.
- Operating temperature 5 to 50°C
- Metal seal
- Clean (particle guarantee)
- Ambient temperature compensated sensor
- EtherCAT communication
- DeviceNet™ communication
Ultra-high-speed flow control
Examples of Use
High-speed etching process
In the semiconductor manufacturing process, throughput improvement is required in parallel with miniaturization. Mass flow controllers that control the flow rate of reaction gases are also increasingly required to shorten the start (rise) time of flow control. The ultra high-speed mass flow controller [MC-7000] is a non-contact thermal flow sensor that does not contact the flow sensor and the flow measuring gas, achieving an ultra high-speed response of 200 msec. The non-contact type enables high-speed flow control for flow measurement of corrosive gases.
Specification Table
| Model | MC-7100C | MC-7200C | MC-7100D | MC-7200D |
|---|---|---|---|---|
| Flow rate in Nitrogen(Full scale) | 10 ～ 5,000SCCM | ～20SLM | 10 ～ 5,000SCCM | ～20SLM |
| Flow rate control range | 2 ～ 100% F.S. | |||
| Accuracy | 100% F.S. ～ 25% F.S. ±1.0% S.P. 25% F.S. ～ 2% F.S. ±0.25% F.S. | |||
| Response time | 0.2sec | |||
| Operating differential pressure | 50 ～ 300kPa | Please check our catalog. | 50 ～ 300kPa | Please check our catalog. |
| Temperature | 5 ～ 50℃ | |||
| Seal materials | SUS316L | Au | ||
| Digital interface | EtherCAT® | DeviceNetTM | ||
