Ultra high-speed mass flow controller with response time of 200msec.

MC-7000 Series

Thermal sensor enables high-speed flow control of 100msec(typical). Lintec’s unique non-contact, thermal flow sensor and piezo control valve enable ultra high-speed flow control of corrosive gases.

High accuracy of ±1.0% S.P. flow rate and digital communication method selectable between DeviceNet and EtherCAT.

Fast Response Mass Flow Controller MC-7000 Series


  • Ultra high-speed flow control 200msec
  • Accuracy ±1%S.P.
  • Operating temperature 5 to 50°C
  • Metal seal
  • Clean (particle guarantee)
  • Ambient temperature compensated sensor
  • EtherCAT communication
  • DeviceNet™ communication

Ultra-high-speed flow control

Examples of Use

High-speed etching process

In the semiconductor manufacturing process, throughput improvement is required in parallel with miniaturization. Mass flow controllers that control the flow rate of reaction gases are also increasingly required to shorten the start (rise) time of flow control. The ultra high-speed mass flow controller [MC-7000] is a non-contact thermal flow sensor that does not contact the flow sensor and the flow measuring gas, achieving an ultra high-speed response of 200 msec. The non-contact type enables high-speed flow control for flow measurement of corrosive gases.

Specification Table

Flow rate in Nitrogen(Full scale)10 ~ 5,000SCCM~20SLM10 ~ 5,000SCCM~20SLM
Flow rate control range2 ~ 100% F.S.
Accuracy100% F.S. ~ 25% F.S. ±1.0% S.P.
25% F.S. ~ 2% F.S. ±0.25% F.S.
Response time0.2sec
Operating differential pressure50 ~ 300kPaPlease check our catalog.50 ~ 300kPaPlease check our catalog.
Temperature5 ~ 50℃
Seal materialsSUS316LAu
Digital interfaceEtherCAT®DeviceNetTM