High temperature mass flow meter with max. 120°C for flow measurement (when energized) and max. 150°C when not energized.
MM-3000L-TN Series
Separation of the hot gas contact area from the electronic substrate allows for use at high temperatures.
Forte
- Operating temperature Max 120°C
- Metal seal
- Clean (Particle Guarantee)
- RS-485 communication
Option
- Heater block
Specification Table
| Model | MC-3102L-TC | MC-3202L-TC |
|---|---|---|
| Flow rate in Nitrogen(Full scale) | 10 ～ 5,000SCCM | ～ 25SLM |
| Flow rate control range | 2 ～ 100% F.S. | |
| Accuracy | ±1.0% F.S. | |
| Temperature | L：80 ～ 100℃ H：100 ～ 120℃ | |
| Seal materials | Au | |
