Versatile mass flow controller with variable flow range function, digital communication (RS-485), and metal seal as standard features.

MC-700 Series

Variable range function allows specifications to be changed for multiple mass flow controllers with a single unit, which not only reduces spare parts, but also enables in-line F.S. changes. Ideal for experimental equipment that frequently changes flow ranges or gas types.

Variable Range(VR) Mass Flow Controller
Variable Range(VR) Mass Flow Controller


  • Variable function
  • Metal seal
  • RS-485 communication


  • RS-232 communication

Examples of Use

Experimental equipment and prototypes

The MC-700 series mass flow controllers are equipped with a VR function that can change the gas type and flow rate as standard, so a single mass flow controller can handle multiple specifications, The MC-700 series is the best choice because it can accommodate multiple specifications with a single unit and costs can be kept low. The seal material is SUS-316L metal seal, which can be used for highly corrosive gases.

Common MFC spare parts

While it is necessary to keep several mass flow controllers of different gas types and flow ranges as spare parts depending on the application, the MC-700 with VR function can handle multiple gas types and flow ranges, including corrosive gases, in a single unit, allowing it to be used in a variety of situations. In addition, by standardizing mass flow controllers, the MC-700 can contribute to the reduction of spare parts.

Specification Table

Flow rate in Nitrogen(Full scale)10 ~ 3,000SCCM~ 10SLM~ 50SLM
Flow rate control range2 ~ 100% F.S.
Accuracy±1.0% F.S.
Operating differential pressure50 ~ 300kPa100 ~ 300kPa150 ~ 300kPa
Temperature15 ~ 35℃
Seal materialsSUS316L