Liquid Mass Flow Controller Principle and Product Features

Using H2O as an example, 1ml of the liquid phase expands to 1,244ml when vaporized under ideal conditions. This technology has become indispensable for semiconductor manufacturing equipment that reacts by controlling and vaporizing liquid flow, which requires highly precise control of minute flow rates.

stability

Flow control devices for liquids include metering pumps, but metering pumps continuously perform mechanical switching, which causes pulsation. Syringe pumps, which do not have mechanical switching, do not pulsate, but they are not suitable for continuous supply due to the limited volume of the pump.

Also, when liquid is introduced into a vacuum system at a controlled flow rate, the flow rate is not stable with a metering pump due to differential pressure.

In the flow control of the liquid mass flow controller, liquid pressurized to a certain pressure by gas is introduced into the liquid mass flow controller, the instantaneous flow rate is detected by the internal flow sensor, and the valve opening degree is constantly controlled, thus enabling constant flow control whether the secondary side is under reduced pressure or atmospheric pressure.

Liquid Mass Flow Meter

Forte	Model	Communication Standard Power source	Temperature Accuracy	Keywords
Liquid microflow MFM	LM-3000L	RS-485 Analog 0 to 5V ±15V power supply	15~35℃ ±1.0%S.P.	Semiconductor Film Deposition Vaporizer

Liquid Mass Flow Controller

Forte	Model	Communication Standard Power source	Temperature Accuracy	Keywords
Liquid microflow MFC	LM-3000L	RS-485 Analog 0 to 5V ±15V power supply	15~35℃ ±1.0%F.S.	Semiconductor Film Deposition Vaporizer
Coriolis MFC	LC-4000	Analog 0 to 5V +24V power supply	15~35℃ ±1.0%F.S.	Semiconductor Film Deposition Vaporizer

Mass Flow Controller Technology Applied Products

Forte	Model	Communication Standard Power source	Temperature	Keywords
Control Valves for Liquid	CV-1000	Analog 0 to 15V	0~50℃	Liquid Control Semiconductor Analysis