Mass flow controller for liquids that can control the flow rate of various liquids without relying on C.F. because it directly measures the mass flow rate with a Coriolis type flow sensor.

LC-4000 Series

LM-3000L is equipped with a high-precision liquid flow sensor, realizing highly accurate micro flow rate measurement of C2H5OH equivalent full scale 0.1g/min to 20g/min.

The built-in PID controller enables liquid flow control by combining with Lintec’s valve-equipped products (vaporizers and control valves).

Coriolis Mass Flow Controller
LC-4000 Series
Coriolis Mass Flow Controller
LC-4000 Series


  • Accuracy ±1% F.S.
  • No conversion factor required
  • High flow liquid control (Max: 140g/min)

Examples of Use

Flow Control of Various Liquids

Coriolis Mass Flow Controllers use Coriolis force to directly measure and control the mass of a liquid phase fluid, making them ideal for flow control of various liquid types regardless of C.F.

Specification Table

Flow rate (H2O)2 ~ 7g/min8 ~ 17g/min18 ~ 140g/min
Flow rate control range10 ~ 100% F.S.
Valve operation modeNormally closed
Accuracy1.0% F.S.
Operating differential pressure50 ~ 300kPa100 ~ 300kPa
Temperature0 ~ 60℃
Seal materialsNC : Ni , RC : Viton®