High performance digital liquid mass flow meter with built-in micro-flow liquid flow sensor and PID controller.

LM-3000L Series

LM-3000L is equipped with a high-precision liquid flow sensor, realizing highly accurate micro flow rate measurement of C2H5OH equivalent full scale 0.1g/min to 20g/min.

The built-in PID controller enables liquid flow control by combining with Lintec’s valve-equipped products (vaporizers and control valves).

High Performance Digital Mass Flow Meter
LM-3000L Series
High Performance Digital Mass Flow Meter LM-3000L Series


  • Micro Flow Liquid Measurement
  • Vaporization flow control
  • Accuracy ±1% F.S.
  • Metal seal
  • Clean (Particle Guaranteed)
  • RS-485 communication


  • High temperature
  • Sterile steam (SPI) treatment

Examples of Use

Flow control of liquid vaporization flow rate

By combining a liquid mass flow meter (LM-3000L) with a vaporizer (VU) with a built-in control valve manufactured by Lintec, the flow rate introduced into the vaporizer can be controlled in the immediate vicinity of the vaporization chamber. Therefore, highly responsive flow control of vaporization is achieved without thermal effects of the vaporizer.

Liquid flow control

By combining a Lintec control valve (CV-1000) and a liquid mass flow meter (LM-3000L) with a built-in PID controller, it can be used as a liquid mass flow controller.

Specification Table

Flow rate C2H5OH conversion0.1 ~ 1.0g/min~ 6g/min~ 30g/min
Flow rate H2O conversion0.1 ~ 0.2g/min~ 1.0g/min~ 15g/min
Accuracy1.0% F.S.2.0% F.S.
Operating differential pressure50 ~ 300kPa
Temperature15 ~ 35℃
Seal materialsAu