Compact non-carrier vaporizer with piezo actuator.
A piezo actuator control valve with micro flow rate control and fast response controls the liquid flow rate in the vicinity of the vaporization chamber.
The flow-controlled liquid is diffused through a mesh filter and heated in the vaporization chamber to achieve stable vaporization even at minute flow rates.
Forte
- Non-Carrier Vaporization
- Micro-flow vaporization
- Valve proximity
- Space saving
- Easy maintenance
Examples of Use
Non-Carrier Vaporization of TEOS
Non-carrier vaporization based on high-temperature MFC has the disadvantage of low vaporization volume. Lintec’s unique non-carrier structure, the VU-3100, can supply non-carrier vaporization of TEOS: 5 g/min (538 SCCM) despite its compact size.
Specification Table
| Max. temperature | Max TEOS vaporization | Wetted materials |
|---|---|---|
| 150℃ | 5g/min | SUS316L, PEEK®, Ni-Co, PTFE, Au |
